LAM 853-042958-232 | RF MATCH ASSY

Core functionality

RF Match is an automatic impedance tuning unit for plasma etching chambers

Connect the RF power generator to the etching chamber, dynamically adjust the internal variable capacitance in real time, and match the load impedance of the chamber with the process variation to the 50 Ω standard impedance of the RF source

Maximizing RF power input into the cavity, reducing reflected power, ensuring plasma stability, and controlling etching rate and uniformity

Built in onboard MCU, position sensor, servo drive motor, automatic scanning, optimization, and locking of matching points; Support communication and process parameter saving of VTM system on the upper computer

Equipped with a water-cooling circuit, it takes away high-power RF loss heat; Built in hardware protection for over temperature, over power, and high reflection power, cutting off RF output in case of abnormalities to protect RF source and cavity

Electrical core parameters

RF operating frequency: 13.56MHz (2300 Metal main frequency band)

Rated RF input power: up to 3000W

Impedance matching range: wide range load adaptive, automatically compensating for impedance drift caused by cavity process, pressure, and plasma state

Control power supply: DC24V (powered by the VTM cabinet of the machine and the same 24V power supply as the Node board)

Communication interface: RS232 serial port, interface with VTM control system (Node1 board 810-802901-305), upload matching status, reflected power, internal temperature, motor position

Protection mechanism: Reflected power over limit protection, water temperature/overheating protection, motor overload protection, hardware interlock shutdown signal output, fault signal connected to VTM I/O link

Internal components: vacuum variable capacitor, servo drive motor, position encoder, RF sampling plate, water-cooled channel, temperature sensor

Water cooling and environmental parameters

Cooling method: Deionized water cooling

Cooling water conditions: 18-22 ℃, DIW， Flow rate ≥ 2.5L/min, pressure 0.2~0.4MPa

Working environment: Fab cleanroom, 10-40 ℃, humidity 5-80%, no condensation

Storage temperature: -20~+70 ℃

Strong EMI environment around the RF cavity, with a fully metal shielding structure for the outer shell

physical parameters

Appearance: Metal enclosed shielded chassis with water-cooled inlet and outlet, RF coaxial interface, and control signal aviation plug

Weight: Approximately 18-22kg

Interface: High power RF coaxial input/output port; Molex multi pin control signal+24V power connector; DIW water-cooled connector

Our products are widely used in CNC mechanical metallurgy, petroleum and natural gas, and petrochemical industries,
Chemical industry, paper and printing, textile printing and dyeing, machinery, electronic manufacturing, automobile manufacturing,
Plastic machinery, electricity, water conservancy, water treatment/environmental protection, municipal engineering, boiler heating, energy, power transmission and distribution.
The quoted price is not the actual price. Please contact the shopkeeper before placing the order to confirm the price and delivery time!!!

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Contact phone number: 15359213550