LAM Research 810-800081-014 | System Interlock

Basic Information

Part number: 810-800031-400, board body Fab number: 710-800031-400

Equipment adaptation: Lam 2300 KIYO3X, 300mm wafer etching machine cavity safety interlock control box

Product type: Whole machine safety interlock PCB assembly, aluminum alloy metal shell packaging unit

Net weight: approximately 0.55kg

Core technical parameters

Power supply specifications

Working power supply: DC24V, standard industrial control power supply for semiconductor machines

Onboard multi-channel relay circuit, hardware hard interlock, independent of software CPU, hardware triggered safe shutdown

Signal and Interface

Input: Multiple digital DI safety points, collecting interlocking signals such as chamber doors, vacuum pressure, temperature, emergency stop, etc

Output: Passive hard contact circuit of relay, cutting off RF power supply, chamber action, gas path in emergency state

External connector: Multi DB serial port+dedicated power socket (DB25/DB9 specifications), used for interconnection with the cavity controller

Onboard optoelectronic isolation circuit, resistant to etching cavity RF EMI interference and clean room static electricity

Features

Security mechanism: Hardware self-locking interlocking circuit, unable to be easily bypassed; Once the interlock is triggered, it must be reset on site to maintain the lock

Response: Millisecond level hardware loop response, meeting semiconductor equipment safety standards

Local diagnosis: Integrated status LED indicator light on the PCB board, used for quickly locating fault interlock channels

environmental conditions

Working environment: Inside a semiconductor dust-free cabinet, with a working temperature of 10~60 ℃

Storage temperature: -20~+70 ℃

Applicable humidity: 10%~90% RH, no condensation

Structure

Shell: Aluminum alloy sealed installation box with mounting bracket

PCB: multi-layer shielded gold-plated board, resistant to plasma RF interference, corrosion-resistant components for semiconductor equipment

Functional Overview

This is the safety protection core unit of Lam Kiyo3X etching machine, which monitors the safety status of the process chamber throughout the process: when the cabin door is opened, vacuum pressure is lost, temperature exceeds the standard, and emergency stop is pressed, the hardware relay circuit directly cuts off the RF power and chamber movement, protecting personnel and chamber hardware, and reporting interlocking fault codes to the machine master control.

Our products are widely used in CNC mechanical metallurgy, petroleum and natural gas, and petrochemical industries,
Chemical industry, paper and printing, textile printing and dyeing, machinery, electronic manufacturing, automobile manufacturing,
Plastic machinery, electricity, water conservancy, water treatment/environmental protection, municipal engineering, boiler heating, energy, power transmission and distribution.
The quoted price is not the actual price. Please contact the shopkeeper before placing the order to confirm the price and delivery time!!!

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