LAM Research 810-073479-005 | Edge Detection Board

Electrical parameters

Power supply: Back panel VME bus power supply+5V, ± 12V DC

Signal level: TTL digital signal, analog photoelectric sensor input

Onboard core: multi-channel signal conditioning circuit, FPGA logic, ADC acquisition unit

Bus interface: VMEbus, 160pin VME backplane connector, compatible with VME64

External I/O: Multiple sensor interfaces on the front board, connected to wafer edge optical sensors

Environmental specifications (SEMI cleanroom standards)

Working temperature: 0~+70 ℃

Storage temperature: -20~+85 ℃

Relative humidity: 5%~95% RH, no condensation

EMC: Meets SEMI S2 semiconductor equipment safety specifications, dust-free workshop anti-interference design

Functional core parameters

Channel: Multi channel optical edge detection acquisition channel, collecting reflected/transmitted light signals from wafer edges

Function: Filter, amplify, and convert analog signals from photoelectric sensors, upload them to the device’s main control CPU via the VME bus, and determine wafer position, offset, and defect detection

Real time performance: high-speed signal sampling, combined with robotic arm transmission to prevent wafer edge collision

Diagnosis: Equipped with built-in board self-test and signal threshold diagnosis, it can report fault codes to the device host

Mechanical Information

Specification: Standard VME 6U board

PCB material: FR4 multi-layer board

Weight: Approximately 0.45-0.52kg

Cooling: air-cooled casing, forced convection heat dissipation by cage

Our products are widely used in CNC mechanical metallurgy, petroleum and natural gas, and petrochemical industries,
Chemical industry, paper and printing, textile printing and dyeing, machinery, electronic manufacturing, automobile manufacturing,
Plastic machinery, electricity, water conservancy, water treatment/environmental protection, municipal engineering, boiler heating, energy, power transmission and distribution.
The quoted price is not the actual price. Please contact the shopkeeper before placing the order to confirm the price and delivery time!!!

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