Basic Information

Part number: 810-073479-215

Brand: Lam Research (Panlin Semiconductor)

Form: Standard VME64 3U board, VME bus backplane direct insertion, does not support hot swapping

Equipment ownership: 2300 Kiyo/Flex, Alliance plasma etching equipment

Functional positioning: VME bus arbitration, system clock synchronization, watchdog management, it is the core board for timing coordination of the entire chassis board

Core hardware specifications

Bus interface

VME64 backplane interface, A16/A24/A32 address space, supports VME bus arbitration, solves the problem of multiple cards accessing the bus simultaneously

Responsible for timing handshake of all VME sub boards such as VIOP-III, AIO simulation board, CPU board, etc.

clock synchronization

Generate a unified system synchronization clock pulse for the entire machine and distribute it to all IO cards in the chassis; The timing synchronization of the equipment manipulator and RF unit depends on the clock signal of this board

The clock jitter index determines the stability of the overall process timing; Clock abnormalities can cause communication interruptions in the robotic arm and process step errors.

Watchdog

Hardware watchdog timer; When the main CPU program freezes, it outputs a hardware reset signal to reset the VME chassis bus, which is a common source of equipment occasional restarts and communication disconnections.

Power supply

Backboard power supply:+5V, ± 12V VME standard power supply; No external terminals, all power supply comes from the VME backplane.

status indicator

Onboard LED status lights: power, bus activity, watchdog trigger, clock running status.

Physics and Environment

Appearance: 3U VME board

Working temperature: 10 ℃ -50 ℃ (internal environment of semiconductor machine chassis)

Storage: -20 ℃~+70 ℃

Main functions

VME bus arbitration: Manage bus requests from multiple boards inside the chassis, allocate bus usage rights, and avoid data collisions and crashes.

Global clock generation and distribution: Provide unified synchronization pulses to IO, analog, and digital boards inside the chassis to ensure precise alignment of etching process timing.

Hardware watchdog monitoring: detects the operating status of the main controller, and when the system runs away, the hardware resets the entire VME bus for fault protection.

Inter board handshake coordination: Handling handshake signals between the CPU, robotic arm controller, and RF power board; Typical phenomena of damage to the board include communication interruption reported by the robotic arm, random reset of the machine, process timing errors, and abnormal recognition of other boards on the VME backplane.