810‑017004‑001 | Lam Research Solenoid Interlock PCB, Semiconductor Spare Part

Overview

810‑017004‑001 is Lam Research OEM Solenoid Interlock PCB board, mainly deployed on Lam Rainbow 4420 plasma etch semiconductor processing equipment. This circuit board manages solenoid drive signals and critical safety interlock logic, monitoring valve and chamber interlock status, preventing unsafe chamber operation conditions.

This is legacy end‑of‑life semiconductor hardware. Original factory new stock is very limited. Available inventory includes new‑surplus, fully refurbished and tested‑used assemblies. Exact full part‑number match is mandatory for replacement; mismatched PN will trigger interlock faults and tool lock‑out downtime.

Key Hardware Features

Dedicated solenoid & safety interlock control PCB for Lam Rainbow series etch tools

Multiple D‑sub high‑density connectors for solenoid tray, interlock sensors and main system connection

On‑board opto‑isolation circuits for interlock signal filtering and noise suppression

Hardware safety interlock logic to protect wafer process chamber and mechanical assemblies

Industrial‑grade PCB construction, designed for long‑term continuous fab cabinet operation

Multiple hardware revisions exist (e.g. REV‑F); revision matching is highly recommended during swap‑out

Typical Applications

Lam Rainbow 4420 etch tool solenoid interlock system repair and PCB replacement

Semiconductor wafer fab equipment overhaul, troubleshooting and component swap‑out

Chamber safety interlock fault diagnosis and legacy plasma tool rebuild projects

Spare‑part stocking for production‑critical legacy 200 mm etch processing equipment

OEM after‑market maintenance for Lam Rainbow 44XX series capital tools

Compatibility Notes

Full part number: 810‑017004‑001. Primary fit for Lam Rainbow 4420 equipment.

Different hardware revisions (REV‑F and others) have component differences. Confirm board revision, tool firmware and wiring pin definition before installation.

Do not substitute with other similar Lam interlock PCB variants; partial‑number replacement will result in safety interlock errors.

Confirm unit condition: new‑surplus / refurbished / tested‑used. Stock availability fluctuates for this obsolete spare part.

FAQ

Q: What is 810‑017004‑001 used for? A: 810‑017004‑001 is Lam Research solenoid interlock PCB board. It controls solenoid outputs and executes safety interlock logic for Rainbow 4420 etch tools, used as maintenance replacement spare part。

Q: Can I use different hardware revision of 810‑017004‑001 on my tool? A: Proceed with caution. Revisions such as REV‑F contain component‑level changes. Verify compatibility with your tool configuration before installation to avoid interlock alarms. Exact revision match is preferred.

Q: Are brand‑new 810‑017004‑001 boards available? A: Original OEM new stock is scarce. We supply new‑surplus, refurbished and fully tested‑used assemblies. Contact us for real‑time stock status and price quotation.

810‑001489‑016 | Lam Research Rocker Valve Interface PCB, Semiconductor Spare Part

Our products are widely used in CNC mechanical metallurgy, petroleum and natural gas, and petrochemical industries,
Chemical industry, paper and printing, textile printing and dyeing, machinery, electronic manufacturing, automobile manufacturing,
Plastic machinery, electricity, water conservancy, water treatment/environmental protection, municipal engineering, boiler heating, energy, power transmission and distribution.
The quoted price is not the actual price. Please contact the shopkeeper before placing the order to confirm the price and delivery time!!!

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