Core technical parameters

Functional positioning machine isolation type digital DI/DO interface board, responsible for signal acquisition and driving of chamber door interlock, solenoid valve, vacuum pressure switch, sensor, relay circuit; Perform photoelectric isolation to protect the main control backplane from strong on-site interference and upload/issue discrete IO states of the machine.

Power supply specifications

Board logic: DC+24V, onboard generation+5V TTL logic power supply

External on-site circuit: 24V DC machine signal circuit

Power consumption: typically around 3.5W

Channel specifications

Multi channel isolated digital input DI: receives 24V field sensor/limit/interlock signals, optically isolated, TTL feedback to backplane bus

Multi channel isolated digital output DO: relay/optocoupler output, driving solenoid valve, indicator light, external alarm circuit

All IO devices are equipped with ESD and surge protection; The interlock circuit is a hardware hard interlock that does not rely on software

Bus and Interface

Backboard: VME specification dedicated connector, connected to the machine system backplane, and communicates with the motion control board and main control board

Front end I/O: high-density onboard connector, leading out to the machine terminal box

Signal level: 24V DC on the field side, 5V TTL logic on the board

Environmental specifications

Working temperature: 15~35 ℃

Relative humidity: 30-70%, no condensation

ESD sensitive components must be protected against static electricity during disassembly and assembly

Vibration: ≤ 0.1G

Hardware protection mechanism

Each channel has independent overcurrent and short-circuit protection

Input surge suppression

Hardware interlocking circuit (safety interlock priority, hardware disconnection, software cannot be bypassed)

Spare Parts Information

Model: Lam Rainbow 4420 plasma etching equipment

Life cycle: EOL discontinued, market supply consists of disassembled and refurbished test parts, with very little original factory inventory

Maintenance testing: Refurbished parts will undergo DI/DO full channel on/off, isolation withstand voltage, and interlock circuit function testing