Function positioning: Multi channel two-phase stepper motor drive board, receives equipment main control pulse/direction signals, drives precision stepper motors inside the machine, with motor winding current sampling, overcurrent, overheating, and wire breakage fault detection, and returns alarm status to the main control.

Power supply specifications

Logic power supply: DC+24V (onboard voltage regulator, generating onboard 5V logic)

Motor power supply: DC 24V power rail (supplied by equipment rack power supply)

driving capability

Drive type: Bipolar two-phase stepper motor

Single channel phase current: up to approximately 2.0A peak, continuously rated at approximately 1.2A

Support micro step subdivision, subdivision configuration of onboard hardware jumper settings (adapted to Lam machine’s original motion curve)

signal interface

Control signals: STEP pulse, DIR direction, ENABLE enable (TTL level)

Feedback signals: current sampling, overheating alarm, motor fault status output

Backplane interface: Standard VME/device specific backplane connector, connected to the internal bus of the machine

Environmental conditions (semiconductor fab clean room)

Working temperature: 15~35 ℃, temperature fluctuation ≤ ± 0.5 ℃

Vibration requirement: ≤ 0.1G, low vibration installation

Anti static requirements: ESD sensitive components must be disassembled with anti-static wristbands/gloves

Humidity: 30-70% without condensation

Mechanical and Reliability

Form: PCB plug-in card, directly inserted into the back panel of the device chassis

Application models: Lam 4420 series and other older generation etching equipment

Protection: Hardware overcurrent protection, overheat shutdown, output short circuit protection