Basic Information

Part number: 810-017015-001

Full name: PCB, DIP, High Frequency (DIP high-frequency control board)

Brand: Lam Research

Version: Mainstream REV B

Applicable machines: Lam Rainbow 4420/TCP 9600 series etching machine, 8-inch wafer machine

Original factory status: EOL is discontinued and there are no new parts available from the original factory; All market sources have dismantled/refurbished test parts

Net weight: 0.25 kg

Functional Overview

This is an RF/plasma high-frequency signal conditioning and driving board, which belongs to the chamber RF circuit matching analog board.

Processing high-frequency RF sampling signals in etching chambers, performing signal attenuation, filtering, and signal shaping

RF power loop monitoring, feedback signal to machine RF controller, stabilizing plasma discharge

Contains DIP discrete component circuits to achieve high-frequency signal isolation and surge suppression

Closed loop control of machine etching process, affecting plasma stability and etching uniformity

Electrical parameters

Board power supply:+24VDC,+15VDC, -15VDC multi-channel machine backplane power supply

Signal type: High frequency analog RF pickup signal, RF small signal conditioning

Signal bandwidth: Suitable for TCP 9600 machine RF working frequency band

Circuit architecture: DIP direct insertion discrete operational amplifier, resistor capacitor, high-frequency transformer, no main CPU, pure analog hardware board

Interface: Onboard DB9, DB25 D-Sub serial port connectors+multiple sets of plastic sockets for RF sampling and machine control bus docking

Protection: On board varistors, RC absorption network, suppress high-voltage spikes and EMI noise caused by RF plasma

Physical and Environmental Specifications

Board type: Large size plug-in PCB, DIP direct insertion components (hence called DIP High Frequency)

Installation method: Fixed installation with screws inside the chassis, non gold finger card insertion

Working environment (inside the machine compartment cabinet)

Working temperature: 0 ℃~+45 ℃

Storage temperature: -20 ℃~+60 ℃

Humidity: 5~85%, no condensation

Usage environment: Strong RF EMI environment, with a large area of grounding shielding design on the board

Protection level: IP00, only used in equipment dust-free cabinets

Spare parts testing standards (can be directly included in the quotation)

Power on test: No short circuit or abnormal heating in multiple power inputs

Impedance test: The impedance of each signal port to ground is normal, and there is no component breakdown

High frequency signal loop verification: Input analog RF signal, verify output waveform and gain linearity

Appearance inspection: DIP components have no desoldering, capacitors have no bulges, interface pins have no corrosion or blackening, PCB has no burn marks

No firmware required, pure analog board, no need to flash programs

Important remarks

Derivative number of the same series:810-017015-001, hardware version is different and cannot be directly exchanged. The software version of the machine needs to be checked

Common failure points: aging of DIP electrolytic capacitors, damage to high-frequency operational amplifiers, oxidation of connector pins, and second-hand parts are most prone to problems

Applicable machine differentiation: 4420 and 9600PTX/DFM share this board, but it is necessary to confirm the machine Part Number and REV version before replacement