810-017003-004 | LAM Research PCB DIP High Frequency Board
Manufacturer:LAM
model name:810-017003-004
Country of Origin: Finland (FI)
Estonia (EE)
Customized: Yes
Minimum order quantity: 1 piece
Order multiplier: 1 piece
Part type: New
WhatsApp:15359213550
WeChat:15359213550
810-017003-004 | LAM Research PCB DIP High Frequency Board
Basic Information
Part number: 810-017003-004
Full name: PCB, DIP, High Frequency (DIP high-frequency control board)
Brand: Lam Research
Version: Mainstream REV B
Applicable machines: Lam Rainbow 4420/TCP 9600 series etching machine, 8-inch wafer machine
Original factory status: EOL is discontinued and there are no new parts available from the original factory; All market sources have dismantled/refurbished test parts
Net weight: 0.25 kg
Functional Overview
This is an RF/plasma high-frequency signal conditioning and driving board, which belongs to the chamber RF circuit matching analog board.
Processing high-frequency RF sampling signals in etching chambers, performing signal attenuation, filtering, and signal shaping
RF power loop monitoring, feedback signal to machine RF controller, stabilizing plasma discharge
Contains DIP discrete component circuits to achieve high-frequency signal isolation and surge suppression
Closed loop control of machine etching process, affecting plasma stability and etching uniformity
Electrical parameters
Board power supply:+24VDC,+15VDC, -15VDC multi-channel machine backplane power supply
Signal type: High frequency analog RF pickup signal, RF small signal conditioning
Signal bandwidth: Suitable for TCP 9600 machine RF working frequency band
Circuit architecture: DIP direct insertion discrete operational amplifier, resistor capacitor, high-frequency transformer, no main CPU, pure analog hardware board
Interface: Onboard DB9, DB25 D-Sub serial port connectors+multiple sets of plastic sockets for RF sampling and machine control bus docking
Protection: On board varistors, RC absorption network, suppress high-voltage spikes and EMI noise caused by RF plasma
Physical and Environmental Specifications
Board type: Large size plug-in PCB, DIP direct insertion components (hence called DIP High Frequency)
Installation method: Fixed installation with screws inside the chassis, non gold finger card insertion
Working environment (inside the machine compartment cabinet)
Working temperature: 0 ℃~+45 ℃
Storage temperature: -20 ℃~+60 ℃
Humidity: 5~85%, no condensation
Usage environment: Strong RF EMI environment, with a large area of grounding shielding design on the board
Protection level: IP00, only used in equipment dust-free cabinets
Spare parts testing standards (can be directly included in the quotation)
Power on test: No short circuit or abnormal heating in multiple power inputs
Impedance test: The impedance of each signal port to ground is normal, and there is no component breakdown
High frequency signal loop verification: Input analog RF signal, verify output waveform and gain linearity
Appearance inspection: DIP components have no desoldering, capacitors have no bulges, interface pins have no corrosion or blackening, PCB has no burn marks
No firmware required, pure analog board, no need to flash programs
Important remarks
Derivative number of the same series: 810-017003-005, hardware version is different and cannot be directly exchanged. The software version of the machine needs to be checked
Common failure points: aging of DIP electrolytic capacitors, damage to high-frequency operational amplifiers, oxidation of connector pins, and second-hand parts are most prone to problems
Applicable machine differentiation: 4420 and 9600PTX/DFM share this board, but it is necessary to confirm the machine Part Number and REV version before replacement
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810-017003-004 | LAM Research PCB DIP High Frequency Board
Our products are widely used in CNC mechanical metallurgy, petroleum and natural gas, and petrochemical industries,
Chemical industry, paper and printing, textile printing and dyeing, machinery, electronic manufacturing, automobile manufacturing,
Plastic machinery, electricity, water conservancy, water treatment/environmental protection, municipal engineering, boiler heating, energy, power transmission and distribution.
The quoted price is not the actual price. Please contact the shopkeeper before placing the order to confirm the price and delivery time!!!
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