Core technical parameters

The functional positioning chamber local safety interlock and IO node control board are the core hardware boards for machine safety protection. Responsible for chamber door interlocking, pressure interlocking, gas safety interlocking, vacuum interlocking, and signal acquisition of various sensors in the chamber; Independent hardware safety circuit, hardware interlocking priority is higher than VME main control software. Simultaneously perform local IO signal preprocessing and upload it to the VME main control system through internal communication links; Gas solenoid valve, vacuum valve drive control, and fault status reporting. When the door is not closed, the pressure is abnormal, or the vacuum is lost, the hardware circuit of the board directly cuts off the dangerous output without relying on the upper computer.

Power supply specifications

Main input power supply: DC+24V

On board voltage regulation generation: 5V, 3.3V logic power supply

Typical power consumption: about 5W

signal channel

Multi channel isolation DI: chamber door position switch, vacuum pressure switch, liquid level/flow sensor, safety limit signal, photoelectric isolation input

Multi channel isolation DO: solenoid valve drive, safety cut-off output, alarm indicator light; Hard interlock channel hardware cut-off output

Local hardware security circuit: independent hardware logic, software cannot bypass, it is a mandatory requirement for Fab security

communication interface

Internal serial bus: communicates with the VME chassis main control (CPU board), uploads chamber status, and receives main control commands

Board end connector: high-density multi pin connector, directly connected to chamber door, vacuum, gas cabinet field sensors and solenoid valves

Environmental specifications (Fab cleanroom)

Working temperature: 15~35 ℃

Relative humidity: 30% -70%, no condensation

ESD sensitive PCBs require anti-static wristbands and clean gloves for disassembly and assembly

Vibration constraint: ≤ 0.1G, fixed installation of chamber frame

Hardware protection

Each IO channel has independent overcurrent, short circuit, and surge protection

Hardware interlock self-locking protection requires on-site hardware reset after triggering the interlock

Input overvoltage clamp protection

Spare parts lifecycle

Applicable model: Lam Rainbow 4420 (200mm plasma etching machine)