Basic Information

Part number: 810-000839-003

Name: ESC Current Monitor PCB (Electrostatic Suction Cup Current Monitoring Board)

Brand: Lam Research

Version: REV B/REV C/REV D (REV D is the most common later version)

Origin: Made in Malaysia

Applicable machine: Lam 2300 series etching machine, equipped with ESC electrostatic suction cup module

Original factory status: End of Life discontinued, no new original factory supply available; Market only disassembles/refurbishes test parts

Net weight: 0.1 kg

Electrical parameters

Power supply:+24VDC board internal power supply, provided by the machine backboard

Measurement channel: Dual ESC current acquisition (ESC+/ESC – positive and negative suction cup current)

Signal type: High voltage isolation analog current sampling, converting the weak current of ESC high voltage circuit into low voltage analog signal and sending it to the machine main control

Isolation device: Two high-voltage isolation amplifier modules (core aging components) on board, isolating the ESC high-voltage plasma circuit from the low-voltage control circuit

Current measurement range: nA to mA level for monitoring the leakage current of small electrostatic suction cups, used for ESC holding/releasing status monitoring and leakage over limit protection

Output signal: After isolation, the analog voltage signal is output to the machine’s ADC for acquisition

Protection function: onboard RC absorption, current limiting resistor, capacitor filtering, suppressing plasma noise and surges

Physical and Environmental Specifications

Board type: Standard PCB card insertion, board edge connector installation

Connector: Board edge gold finger interface, direct insertion into the ESC power distribution backplane of the machine

Working environment (inside wafer fab machines)

Working temperature: 0 ℃~+45 ℃

Storage temperature: -20 ℃~+60 ℃

Relative humidity: 5%~85%, no condensation

Anti interference: specially designed for plasma strong EMI environment, with large area grounding and isolation shielding on the board

Protection level: IP00 (bare PCB board, used in a dust-free chassis, cannot be exposed separately)

Key Features

Real time collection of ESC electrostatic suction cup working leakage current, distinguishing between normal adsorption current and abnormal leakage current

Report the machine alarm after the current exceeds the limit to protect the wafer, ESC suction cup, and high-voltage power supply from breakdown

Isolate the high voltage ESC circuit from the low voltage control side to prevent high voltage from entering the main control board of the machine and causing extensive damage

Signal conditioning and filtering to remove etching plasma noise and ensure stable current readings

Spare parts testing standards (can be directly written into the quotation)

24V power on test, no short circuit, no abnormal heating

Isolation module insulation test (key item, aging parts are most prone to failure)

Simulate current input and verify the linearity of two channel outputs

Golden finger appearance inspection, no corrosion, no peeling, no bulging capacitors on components

Firmware: The board does not have MCU firmware, purely simulates hardware circuits, and does not require program flashing