Basic Information

Part number: 810-495586-001

Brand: Lam Research (Panlin Semiconductor)

Board type: Interlock BD Security Interlock Signal Processing Board

Compatible devices: 2300 Kiyo, 2300 Flex 300mm plasma etching machine

System positioning: Centralized collection of safety interlock signals for the entire machine, logical voltage division, and filtering adapter board; Collecting chamber door interlock, safety door, emergency stop, pressure interlock, and mechanical arm safety circuit signals, outputting them to VIOP-III (810-099175-011) for safety logic judgment, is a critical link in the equipment safety protection chain.

Similar materials: 810-495585-001, hardware version differences, some chassis are interchangeable, connector pins have local differences, cannot be blindly replaced directly.

Hardware core specifications

signal interface

Multi channel 24VDC isolated digital input DI: receives safety interlock switch signals from various parts of the machine (chamber door, transmission door, emergency stop button, pressure safety switch, mechanical arm safety barrier)

Onboard voltage division, RC filtering, ESD surge suppression, filtering out electromagnetic interference in the cabinet environment, protecting the back-end VIOP-III analog/digital input channels

Multiple sets of Molex connectors: interlocked sensor input, ribbon output to VIOP-III, power interface

No processor, no firmware, pure hardware logic PCB, does not participate in VME or LonWorks bus communication.

power supply

External 24VDC cabinet power supply, not powered from VME backplane

Onboard fuse and power reverse protection.

Indicator light

Only power status LED; No bus communication indicator light.

Physics&Environment

Form: Independent PCB, cabinet screw locking installation

Working temperature: 10 ℃ -50 ℃ (inside the semiconductor equipment cabinet)

Storage temperature: -20 ℃~+70 ℃

Origin: United States.

Main functions of the whole machine

Summary and conditioning of safety interlock signals: Collect all hard wired safety interlock switch signals from the machine, filter and protect them, and forward them to the VIOP-III board for reading.

Safety circuit isolation protection: Isolate on-site switch side surges and static electricity to prevent surges from penetrating the back-end VME board IO channel.

Hardware signal relay: When the interlock signal is abnormal, it is directly sent to the control system to trigger a safe shutdown, prohibiting the start of the cavity process and the movement of the robotic arm.

It does not make logical judgments, and all logical operations are completed by VIOP-III.

Typical fault phenomena

The device randomly reports various interlock triggers, but the actual cabin door and emergency stop switch are all normal

All interlock signals are read as trigger status, the equipment cannot start the process, and the robotic arm is locked and cannot move

Partial interlock signals occasionally jump, causing the machine to enter a safe shutdown without reason

VIOP-III reads interlock input signals with all 0 or full levels

No VME, Clock Arb, LonWorks node disconnection alarms will be reported, and the fault phenomena are concentrated in safety interlock, process prohibition, and mechanical arm prohibition.