Basic Information

Part number: 810-082745-003

Brand: Lam Research (Panlin Semiconductor)

Board type: LonWorks Node Type-33 fieldbus interface PCB board

Applicable machines: 2300 Kiyo, 2300 Flex plasma etching machine

Function: LonWorks bus IO node, interfaces with local sensors, solenoid valves, limit switches of the machine, completes on-site IO signal acquisition and driving, and interacts with the upper VME control system for data exchange.

Hardware core specifications

bus communication

Main communication: LonWorks (Echelon) fieldbus, differential twisted pair communication, multi node bus networking; Multiple nodes of the same type are hung on the same Lon bus inside the machine

Onboard Neuron chip, implementing Lon protocol stack processing, local IO logic operation, reducing the load on VME main controller

Communication speed: 78 kbps; The maximum number of nodes supported by the bus is 64

IO channel resources

Digital input DI: 16 channels, 24VDC input, optoelectronic isolation

Digital output DO: 16 channels, 24VDC collector open circuit output, driving solenoid valve and indicator light

No analog channel; Simulate signals to be processed by other AIO boards

power supply

External power supply: 24VDC, powered locally on the board, not from the VME backplane

Onboard power filtering and surge protection; Reverse protection circuit

Interface and indicator lights

2 sets of terminal blocks: IO terminal blocks+LonWorks bus terminal blocks

LED status lights: power supply, Lon bus communication status, IO activity indicator lights

Firmware: onboard Flash storage node firmware, supports on-site firmware download and update

Physics&Environment

Installation: Fix the PCB with screws inside the chassis, non VME card; Not hot swappable, power off for replacement

Working temperature: 10 ℃ -50 ℃ (semiconductor equipment cabinet environment)

Storage temperature: -20 ℃~+70 ℃

Origin: United States

Main functions

Local IO acquisition driver: collects switch values such as chamber limit, door interlock, pressure switch, etc; Drive gas solenoid valves and mechanical actuators.

LonWorks bus node: Package the on-site IO status and upload it to the VME main control system through the Lon bus; Receive output instructions from the main control and execute them locally.

Local preprocessing: The Neuron chip performs simple IO filtering and stabilization to reduce bus data traffic.

Fault reporting: Bus disconnection, power abnormality, IO short circuit will trigger an alarm to the upper computer.

Typical fault phenomena

Lon bus communication error, corresponding to a group of IO failures

Some solenoid valves do not operate and switch signals cannot be read

The device randomly reports an interlock fault, and the IO status occasionally jumps

Bus node lost contact, device reports loss of Node-33 communication